Semiconductor Equipment Testing

Cost-effectively address the hazards of high-tech manufacturing

Cost-effectively address the hazards of high-tech manufacturing

Semiconductor Equipment and Materials International (SEMI)

semiconductor testing equipmentThe semiconductor and related industries are driven; by rapid technological innovation and evolving market trends. To remain competitive, manufacturers must continually adapt to the growing number of materials, device structures, fabrication processes, and integrated circuit designs. In addition, semiconductor manufacturing involves a wide range of environmental, health, and safety hazards. As the industry becomes more complex, so do the global requirements for ensuring safety, quality, and sustainability.

TÜV SÜD's multidisciplinary team of experts possesses the knowledge and experience to provide you with industry-accepted equipment assessment services according to SEMI S2 and other SEMI guidelines and other internationally recognized standards. Our extensive range of in-house services for SEMI S2 helps manufacturers and end-users to cost-effectively address the hazards of high-tech manufacturing.


  • SEMI S2-0818 (Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment)
  • SEMI S22 (Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment)
  • SEMI S8 (Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment)
  • SEMI S6 (Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment)
  • SEMI S10 (Safety Guideline for Risk Assessment and Risk Evaluation Process)
  • SEMI S14 (Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment)
  • SEMI F47 (Voltage Sag Immunity Standard)
  • SEMI E6 (Guide for Semiconductor Equipment Installation Documentation)
  • CSOP 39 - Seagate's Standard Operating Procedures (SOP)

Semiconductor Equipment and Materials International (SEMI) is a global industry association with members from all sectors of the semiconductor and related industries. The Environmental Health and Safety (EHS) Committee within SEMI’s International Standards Division develops the industry standards and guidelines above that are globally accepted as ensuring the highest level of safety and quality.


SEMI standards have been developed, reviewed, and often updated by the SEMI International Standards Program and its industry expert members who; focus on lowering manufacturing costs, the development of new industries, and guaranteeing the existence of open markets. SEMI S2 is the foundation guideline in SEMI's fleet of safety documents which defines the minimum safety requirements required for your semiconductor products. Conforming to SEMI S2 contributes to the marketability of your products and the efficiency and profitability of your business. Additionally, most purchasers of semiconductor and flat panel manufacturing and inspection tools will require compliance with the SEMI S2 requirements.

On top of SEMI S2 guidelines, there are other SEMI safety guidelines such as SEMI S14 for Fire Risk, SEMI S3 for Heated Baths, and SEMI S8 for the Ergonomics Engineering of Semiconductors, to name but a few.

In many instances, customers may contractually require conformance to SEMI S2 guidelines. Furthermore, some local authorities also use parts of the SEMI S2 guidelines to ensure that equipment meets electrical and fire safety requirements.

How We Can help you

In addition to offering comprehensive evaluations and reports, we can provide you with our TÜV SÜD certification marks, which are globally recognized and synonymous with quality and safety.

Additional Services

We can also assist you with design requirements, testing for CE Marking, In Situ EMC testing, Field Evaluations and Labeling of equipment in the United States and Canada, as well as international approvals, working directly with our global semiconductor experts.

Design & build: We offer design evaluation and testing services of manufacturing equipment and components to support compliance with SEMI S2 guidelines, CE marking, NRTL, CSA and in-situ EMC, as well as many other specific end-user or local requirements.

Installation: Our on-site testing services establish compliance with regulatory requirements, such as field labeling in the U.S. and Canada. We also provide EH&S services to assist with the on-time start-up or expansion of large facilities, and help to create programs to ensure that good equipment design is not compromised by unsafe equipment installation. 

Operation & maintenance: TÜV SÜD supports the development, implementation and monitoring of a broad range of EH&S-related programs.

Change & modification: We offer evaluation and testing services according to SEMI S2 safety guidelines to ensure that changes and modifications to equipment do not adversely affect the hazard or risk characteristics of the equipment or its surroundings.

Decommissioning & disposal: We provide EHS services to create programs, procedures and testing to ensure that equipment or facility decontamination and decommissioning can be done in a safe and effective manner.

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