Semiconductor equipment testing
How to get your semiconductor equipment safe, reliable, and compliant with the support of TÜV SÜD.What is semiconductor testing?
To remain competitive, semiconductor manufacturers must continually adapt to the growing number of materials, device structures, fabrication processes and integrated circuit designs. In addition, semiconductor manufacturing involves a wide range of environmental, health and safety hazards that you must consider.
TÜV SÜD provides services to the semiconductor industry and related industries to address industry challenges. We will help ensure that your products are safe, reliable, and compliant with regulatory standards.
Why semiconductor testing is important
Semiconductor testing and assurance from a trusted third party such as TÜV SÜD represents high quality and a well-known test mark for safety and reliability. It can help you improve your product design by working with you throughout your manufacturing process. This will facilitate greater acceptance of your product in every market you are in, and faster market entry to new markets.
By meeting global industry standards for safety and quality, you will safeguard your business reputation and gain a competitive edge. You can also avoid costly rework and ensure seamless integration of your semiconductors into your customers’ products.
How TÜV SÜD can help you with semiconductor testing
TÜV SÜD has extensive knowledge and expertise in the field of semiconductors. Our vast knowledge and experience can provide you with industry-accepted semiconductor testing services.
We have a multidisciplinary team of experts all over the world. These experts are active in major markets including the U.S., Europe, China, Japan, Taiwan, Singapore and Korea. We provide service support throughout your product lifecycle.
We assess according to SEMI® Standards and other internationally recognised specifications (IEC, ISO, EN, UL, CSA). Our team constantly stays up to date with the latest technical and regulatory knowledge.
Our extensive range of in-house services for semiconductor standards can help you cost-effectively address the hazards of high-tech manufacturing.
What our semiconductor testing service includes
Semiconductor equipment testing
We offer evaluation and testing services according to SEMI® Standards, CE, UKCA, NFPA 79, US FES, and other internationally recognised safety standards.
By conducting comprehensive testing, we ensure that changes and modifications to equipment do not adversely affect the hazard or risk characteristics of the equipment or its surroundings.
Our testing scheme reduces development costs, improves product performance, ensures compliance with regulations, and provides a competitive advantage in the market.
TÜV SÜD’s semiconductor equipment testing capabilities include:
- Cleanroom test
- Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration (ISO14644-1)
- Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO14644-14)
- Electrostatic Discharge (ESD) Immunity test (EN 61000-4-2)
- Laser Safety Requirements (IEC/EN 60825-1 & EN ISO 11553-1)
- Robots and robotic devices
- Safety requirements for industrial robots (ISO 10218-1 & ISO 10218-2)
- Collaborative robots (ISO/TS 15066)
- Automated Guided Vehicle (AMR) / Autonomous Mobile Robot (AGV) (ISO 3691-4)
- Machinery Safety
- General principles for design - Risk assessment and risk reduction (ISO 12100:2010)
- Electrical equipment of machines - Part 1: General requirements (IEC 60204-1:2016)
- Machinery Safety Assessment and Certification
- Electromagnetic Compatibility (EMC) Testing
- Industrial Cybersecurity Certification (IEC 62443)
- Shock and Vibration Test
- Packaging Test
- Environmental Monitoring
- Sustainability services (PCF, LCA and EPD)
Semiconductor certification and admission
Our goal is to keep the testing time to a minimum while ensuring the compliance of your product. For more complex products, we test each key area (electrical safety and chemistry) in parallel.
Upon successful completion of testing, we will certify your product with a SEMI® Test Mark.
Frequently asked questions (FAQs)
What is the testing process?
What are the challenges faced by semiconductor businesses and related industries?
The major challenge for semiconductor businesses is to meet complex international regulations and standards. These include environmental regulations, trade policies, and quality standards. However, the SEMI International Standards program and its industry expert members have developed, reviewed and often updated SEMI standards.
Managing these challenges requires strategic planning, continuous innovation, adaptability, and collaboration with experienced partners such as TÜV SÜD.
What is semiconductor testing?
By subjecting the ICs to various tests and simulations, manufacturers can verify their functionality, reliability, and overall quality, assuring that they use only fully functional components in the production of electronic devices.
Why is semiconductor testing important?
Consequently, testing is essential to ensure the credibility of manufacturers and promote trust among consumers.
Who should consider semiconductor testing services?
This includes:
- Semiconductor manufacturing companies.
- Manufacturers of electronic devices such as smartphones, computers, automotive systems, and home appliances.
- Original Equipment Manufacturers (OEMs) that design and assemble electronic products.
- Electronics component suppliers.
- Organisations responsible for certifying electronic products.
What are the relevant standards for SEMI® Testing?
The most relevant global guidelines for semi safety standards include, but are not limited to:
- SEMI® S1: Safety guideline for equipment safety labels
- SEMI® S2: Environmental, health, and safety guideline for semiconductor manufacturing equipment
- SEMI® S3: Safety guideline for process liquid heating systems
- SEMI® S6: Environmental, health, and safety guideline for exhaust ventilation of semiconductor manufacturing equipment
- SEMI® S8: Safety guideline for ergonomics engineering of semiconductor manufacturing equipment
- SEMI® S10: Safety guideline for risk assessment and risk evaluation process
- SEMI® S12: Environmental, health and safety guideline for manufacturing equipment decontamination
- SEMI® S13: Environmental, health and safety guideline for documents provided to the equipment user for use with semiconductor manufacturing equipment
- SEMI® S14: Safety guideline for fire risk assessment and mitigation for semiconductor manufacturing equipment
- SEMI® S17: Safety guideline for unmanned transport vehicle (UTV) systems
- SEMI® S22: Safety guideline for the electrical design of semiconductor manufacturing equipment
- SEMI® S23: Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment
- SEMI® S26: Environmental, health, and safety guideline for FPD manufacturing system
- SEMI® S28: Safety guideline for robots and load ports intended for use in semiconductor manufacturing equipment
- SEMI® F19: Specification for the surface condition of the wetted surfaces of stainless steel components
- SEMI® F47: Specification for semiconductor processing equipment voltage sag immunity
- SEMI® E33: Guide for semiconductor manufacturing equipment electromagnetic compatibility (EMC)
- SEMI® E187: Specification for cybersecurity of fab equipment
- SEMI® E188: Specification for Malware free equipment integration