Surface Analysis

Analyse the chemical composition of surface layers

Analyse the chemical composition of surface layers


The surface composition affects a material's properties and influences its eventual use and performance. Analysing the chemical composition at the surface and interface layers provides critical information on product surface quality, contamination, reaction and stability.

TÜV SÜD provides comprehensive surface analysis services to help various industries such as semiconductor, microelectronics, advanced materials, polymer products manufacturing determine the product performance and process conditions. Specialised instruments such as the X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES) are employed to help obtain the composition of a surface by analyzing the photoelectrons that are emitted.


The surface analytical techniques include:

Surface chemical analysis

  • Composition
  • Chemical state
  • Contamination
  • Oxidation/Corrosion

Surface physical analysis

  • Surface morphology
  • Roughness
  • Microhardness

Thin film analysis

  • Compositional depth profile
  • Trace contamination
  • Film thickness
  • Diffusion/Migration
  • Dopant profile
  • Ultra shallow dopant profile
  • Cross-section

Characterization of nano-materials

  •  Morphology of nano-structures
  • Size of nano-materials


  • Microanalysis X-ray Photoelectron Spectrometer (XPS)/Electron Spectroscopy for Chemical Analysis (ESCA)
  • Field emission Auger Electron Spectrometer (AES)
  • Time-Of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
  • Scanning Electron Microscopes (SEM)/Energy Dispersive X-ray (EDX)
  • Atomic Force Microscope (AFM)
  • Fourier Transform InfraRed spectrometer (FTIR) with microscope
  • X-Ray Diffractometer (XRD)
  • X-Ray Florescence spectrometer (XRF)
  • X-ray imaging system
  • Surface profilometer
  • Microhardness tester
  • Contact angle and surface tension analyzer


  • Protect your company from costly and image damaging scandals and recalls
  • Reduce your business risks by meeting regulatory requirements and standards
  • Increase quality and safety of your products and processes
  • Save time and costs as we provide you with a one-stop testing and certification service
  • Leverage on our global accreditations
  • Leverage on our state of the art laboratories with comprehensive testing equipment and professional expertise
  • Increase customer confidence in your product when your product goes through independent testing
  • Shorten your time-to-market and increase market access when you meet regulatory requirements and standards

Next Steps

Site Selector